D. HAH, "Analytical design of MEMS variable capacitors based on shaped-finger comb-drives," Microsystem Technologies , vol.28, no.6, pp.1423-1434, 2022
HAH, D. 2022. Analytical design of MEMS variable capacitors based on shaped-finger comb-drives. Microsystem Technologies , vol.28, no.6 , 1423-1434.
HAH, D., (2022). Analytical design of MEMS variable capacitors based on shaped-finger comb-drives. Microsystem Technologies , vol.28, no.6, 1423-1434.
HAH, DOOYOUNG. "Analytical design of MEMS variable capacitors based on shaped-finger comb-drives," Microsystem Technologies , vol.28, no.6, 1423-1434, 2022
HAH, DOOYOUNG. "Analytical design of MEMS variable capacitors based on shaped-finger comb-drives." Microsystem Technologies , vol.28, no.6, pp.1423-1434, 2022
HAH, D. (2022) . "Analytical design of MEMS variable capacitors based on shaped-finger comb-drives." Microsystem Technologies , vol.28, no.6, pp.1423-1434.
@article{article, author={DOOYOUNG HAH}, title={Analytical design of MEMS variable capacitors based on shaped-finger comb-drives}, journal={Microsystem Technologies}, year=2022, pages={1423-1434} }